Parts Sales
| Parts No. | Description | Condition | Quantity | |
|---|---|---|---|---|
|
0200-35618 | Wafer Lift Pin 200 MM RO | Xycarb New | 8 |
|
0200-35017 | Chamber Liner QTZ Upper RP | Xycarb New | 1 |
|
0200-35023 | Chamber Liner Qtz Lower RP | Xycarb New | 1 |
|
0200-35688 | Chamber Liner Lower-EPI/ATM RO | Xycarb New | 1 |
|
0200-35007 | RP Upper Dome RO | Xycarb New | 1 |
|
0200-35042 | Lower Dome OM-100, Centura | Xycarb New open | 1 |
|
UP0251A-05P | UMEC UP0251A-05P | New | 50 |
|
JD25K/JT3175T | JD25K Breaker/JT3175T Trip Unit | AS-IS | 3 |
|
0100-35059 | Remotes Distribution Assy | AS-IS | 2 |
|
0190-35634 | DCSxZ Chamber SCR Driver | AS-IS | 3 |
|
0100-20037 | Interlock Select Board, Assy | AS-IS | 1 |
|
0100-35126 | Incompatible Gas Lockout Board | AS-IS | 10 |
|
0100-35250 | Dual Gas Leak Detector Assy, DPS Centura | AS-IS | 2 |
|
0100-35054/0190-70108 | Mxp Chamber Interfacer Board | AS-IS | 3 |
|
00987-104 | 332 Penta Convectron Board | AS-IS | 3 |
|
0090-05327 | Dual Gas Leak Detector Assy | AS-IS | 2 |
|
0090-76109 | SBC 440 Board | AS-IS | 1 |
|
0100-00462 | Relay Interfacer TPI Assy | AS-IS | 1 |
|
0100-20038 | Relay Control Board, Assy | AS-IS | 1 |
|
0100-35138 | Dual Gas Leak Detector Assy, DPS Poly Centura | AS-IS | 1 |
|
Chamber P2 Board | AS-IS | 1 | |
|
0100-20051 | Turbo Interconnect Board, Assy | AS-IS | 2 |
|
0100-38000 | Reactive Gas Interlock Board, Assy | AS-IS | 2 |
|
0100-16009 | SMIF-ASYST Wide Body w/Testing, Assy | AS-IS | 1 |
|
0100-35024/0100-09006 | Centerfinder SBC, Assy | AS-IS | 9 |
|
0130-76027 | Centerfinder Extender, Assy | AS-IS | 9 |
|
MILLIPORE Tylan 2900 | MFC Mass Flow Controller | AS-IS | 2 |
|
MILLIPORE Tylan 2950 | MFC Mass Flow Controller | AS-IS | 24 |
|
MILLIPORE Tylan 2920 | MFC Mass Flow Controller | AS-IS | 6 |
|
STEC SEC-4400 | MFC Mass Flow Controller | AS-IS | 54 |
|
STEC SEC-4500 | MFC Mass Flow Controller | AS-IS | 41 |
|
STEC SEC-4550 | MFC Mass Flow Controller | AS-IS | 13 |
|
STEC SEC-7330 | MFC Mass Flow Controller | AS-IS | 5 |
|
STEC SEC-7340 | MFC Mass Flow Controller | AS-IS | 17 |
|
STEC SEC-7350 | MFC Mass Flow Controller | AS-IS | 14 |
|
STEC SEC-7440 | MFC Mass Flow Controller | AS-IS | 14 |
|
STEC SEC-7450 | MFC Mass Flow Controller | AS-IS | 4 |
|
STEC SEC-7455 | MFC Mass Flow Controller | AS-IS | 15 |
|
Tylan 2950 | MFC Mass Flow Controller | AS-IS | 3 |
|
UNIT UFC-1661 | MFC Mass Flow Controller | AS-IS | 3 |
|
UNIT UFC-1660 | MFC Mass Flow Controller | AS-IS | 3 |
|
UNIT UFC-8160 | MFC Mass Flow Controller | AS-IS | 36 |
|
Aera FC-981C | MFC Mass Flow Controller | AS-IS | 22 |
|
Aera FC-D980C | MFC Mass Flow Controller | AS-IS | 14 |
|
Aera FC-7800CD | MFC Mass Flow Controller | AS-IS | 21 |
|
Aera FC-7810CD | MFC Mass Flow Controller | AS-IS | 16 |
|
Aera FC-7810SB | MFC Mass Flow Controller | AS-IS | 2 |